All / PLASMA THERM All FEATURED PRODUCTS APPLIED MATERIALS GASONICS LAM MATRIX NOVELLUS PLASMA THERM RTA SPTS TEGAL TEL VARIAN VARIAN/NOVELLUS 3180 VARIAN/NOVELLUS 3290 CMP MISC ICS-102201454 INHIBITOR, HE PLASMA, CERAMIC ICS-102201456 ESC, CERAMIC, INSULATOR TUBE, CERAMIC ICS-102202287-96 FOCUS RING, 150MM, CERAMIC ICP 96% ICS-102202287-99.8 FOCUS RING, 150MM, CERAMIC 99.8% ICS-102202288-96 FOCUS RING, 200MM CERAMIC ICP 96% AL203 ICS-102228206 VESPEL PIN, LIFT, .063DIA ICS-102253139-99.8 SURROUND, 150MM WITH NOTCH, ESC 99.8% ICS-102270790-96 INSULATOR, CERAMIC, ESC CAPS 96% ICS-102302588-96 SLEEVE, INNER, GAS ANNULUS 96% ICS-102356364 ENDPOINT ROD, SAPPHIRE 0.5" OD X 0.5" L ICS-102368754 LINER, LID, CERAMIC 99.8% ICS-102368754-96 LINER, CERAMIC LID 96% ICS-102370365-96 SURROUND LOCK, CERAMIC, ESC 96% ICS-102370365-96W SURROUND LOCK, CERAMIC, ESC ICS-102376180 SURROUND, ESC, 150MM NOTCH ICS-102376180-96 SURROUND-ESC-150MM NOTCH W LOCK ICS-102376180-99.8 SURROUND, ESC, 150MM NOTCH, 99.8..REV 5 ICS-102379715-96 SLEEVE, GAS ANNULUS, ICP SOURCE 96% ICS-102379715-96-W REWORK, SLEEVE, GAS ANNULUS, ICP SOURCE 96% ICS-158752 CERAMIC RING ICS-41000-77553-010 BELLOWS, CLAMP, TWV ICS-41000-77553-010W BELLOWS, CATHODE, REWORK ICS-41100-77804-010 INSULATOR, CATHODE CERAMIC ICS-41100-78006-010 DARK SP SHIELD VAC. CHAMBER ICS-41100-82915-010 ICP GAS RING ICS-41100-85870-010 4" FEATURE PLATE ICS-41100-87729-010 SHIELD, DARK SPACE, ICP, ESC, 8.62 RND ICS-41100-89038-010 CLAMP RING, 8.62 RND ELECTRODE, ICS-2470312 ICS-41100-89804-010 4.25" FEATURE PLATE ICS-41100-90575-010 CVR PLT, CER, ES CHUCK 100 MM ICS-41100-92231-010 BEZEL, RAISED VIEWPORT, 2" CTR ICS-41100-92237-010 CHAMBER LINER UPPER ICS-41100-92238-010 RIE 50X CHAMBER, LINER SHIELD ICS-41110-00236-160 WINDOW, RND, QTZ 2.5" ICS-41110-00236-350 WINDOW, SAPPHIRE, RND, DIA 1.5" ICS-41110-92228-010 COVER PLATE, RAISED VIEWPORT CTR ICS-41120-77458-010 PLUG CERAMIC ICS-41120-82813-010 CERAMIC SPOOL ICS-41120-87722-010 INSUL, CATHODE, CERM ICP, ESC ICS-41120-88200-010 6" CERAMIC WAFER CLAMP ICS-41120-89808-010 WAFER CLAMP 4.25", CERAMIC ICP ICS-41120-91001-010 WAFER CLAMP 4", CERAMIC ICS-41120-91002-010 RING, FOCUS CERAMIC ICS-41130-82106-010 CERAMIC FEEDTHRU FOR LAPECVD ICS-41510-83745-010 BELLOWS FOR VLR ALIGNER ICS-41510-83745-010W BELLOWS WAFER ALIGNER, REWORK ICS-41510-87721-010W BELLOWS, UNGUIDED, LIFT ICS-716310 150 WAFER SHIELD CVR - PIN ESC ICS-A00001545-96 SPOOL, CERAMIC, SLEEVE, ICP 96%