VARIAN/NOVELLUS 3290

ICS-00-672313-00 TOP RING
ICS-00-672406-00 SHUTTER-LARGE, BLASTED
ICS-00-674493-01 CLIP RING RETAINER SPRING PACK (10 PER PACK)
ICS-00-674494-01 SPRING SHIELD RETAINING PACK (10 PER PACK)
ICS-00-678476-01 INSERT SCREEN AL
ICS-00-678477-01 INSERT SOLID AL
ICS-00-680574-00 CAVITY SHIELD, P/P 6"
ICS-00-680574-00W PRESSURE SHIELD REWORK
ICS-00-681028-00 COVER, BLANK OFF
ICS-00-682203-00 COOLING RING, SUPPORT, CERAMIC
ICS-00-682216-00 6" CERAMIC RING
ICS-00-682216-00-SST 6" STAINLESS STEEL RING
ICS-00-682229-00 INS. CENTER POLE
ICS-00-682232-00 BOTTOM RING
ICS-00-682237-00 INNER RING
ICS-00-682938-00 OUTER RING
ICS-00-683445-04 ETCH HEAD INSERT TABLE
ICS-00-683445-04-SST RF ETCH TABLE INSERT STAINLESS STEEL
ICS-00-683521-01 SCREW COVER SHIELD
ICS-00-683521-01-AL SCREW COVER, ALUM VERSION
ICS-00-683707-00 SHIELD CERAMIC CLIP
ICS-00-683707-01 SHIELD T-SLOT 6"
ICS-00-683707-01M 6" SHIELD CLIP RING MODIFIED
ICS-00-683764-03 TITANIUM DISC
ICS-04-710446-06 RF CAN ASSY
ICS-04-712083-01 CONFLAT HOL
ICS-04-712083-03 SHIELD, SHUTTER FEEDTHRU, CHAMBER HOLE
ICS-04-712090-01 SHUTTER ASSY, QUICK CHANGE, 150MM
ICS-04-712093-01 REAR PLATE (S/S)
ICS-04-712094-01 P/P RAM SHIELD, SMALL HOLE
ICS-04-712094-02 L/L RAM SHIELD ASSY, BIG HOLE
ICS-04-712156-01 SHIELD, P/P RAM
ICS-04-712159-01 LOAD LOCK RAM SHIELD
ICS-04-712162-01 LOWER CHAMBER SHIELD
ICS-04-712165-01 SHIELD, F/P HEATER BORE
ICS-04-712186-01 COLLAR, P/P RAM
ICS-04-712186-02 THREADED BRACKET
ICS-04-712188-01 SHIELD, ASSY P /P RAM
ICS-04-712190-01 UPPER CHAMBER SHIELD
ICS-04-712199-01 6" HEATER SHIELD
ICS-04-712209-01 SHIELD SCREW, CAVITY
ICS-04-714049-01 NC SHIELD
ICS-04-714075-01 CLIP
ICS-04-714076-02 RING, 6" CERAMIC
ICS-04-715865-01 CAVITY SHIELD, 2 HOLES
ICS-04-715866-01 PRESSURE PLATE SHIELD
ICS-04-717629-01 DBL FILAMENT
ICS-04-718928-01 CAVITY SHIELD 6"