TEGAL Categories: All FEATURED PRODUCTS APPLIED MATERIALS GASONICS LAM MATRIX NOVELLUS PLASMA THERM RTA SPTS TEGAL TEL VARIAN VARIAN/NOVELLUS 3180 VARIAN/NOVELLUS 3290 CMP MISC All / TEGAL All FEATURED PRODUCTS APPLIED MATERIALS GASONICS LAM MATRIX NOVELLUS PLASMA THERM RTA SPTS TEGAL TEL VARIAN VARIAN/NOVELLUS 3180 VARIAN/NOVELLUS 3290 CMP MISC ICS-33-337-001 BELLOWS, INNER ICS-33-337-017 INNER BELLOWS ICS-33-338-001 OUTER BELLOWS ICS-33-349-004 ELECTRODE UPPER CONE HEAD ICS-33-527-002W BELLOWS, CHUCK PIN LIFT, REWORK ICS-37-1031-001 SPR, WAFERLAND LIFTAB 150MM ICS-37-221-001 UPPER ELECTRODE ICS-37-221-002 UPPER ELECTRODE ICS-37-221-003 SHOWERHEAD, H.P., ANODIZED ICS-37-439-003 UPPER ELECTRODE REV 3..WITHOUT MAGNETS ICS-37-439-003 R3 UPPER ELECTRODE WITHOUT MAGNETS ICS-37-440-007 NOZZLE, CERAMIC 6500 HRE2 ICS-39-297-002 QUARTZ PIN ICS-39-306-001 UPPER ELECTRODE 10 HOLE ICS-39-424-001 TEFLON INSULATOR OUT OF SPEC ICS-39-627-004IR ELECTRODE RING 901E ICS-39-662-001 CHAMBER WALL 1.56 ICS-39-662-002 TRIODE WALL CHAMBER ICS-39-676-001 ELECTRODE UPPER (H2O) JACKET ICS-39-680-003 ELECTRODE CONE HEAD VENTED ICS-39-680-005 ELECTRODE UPPER VENTED ANODIZED ICS-39-700-003W UPPER ELECTRODE REWORK ICS-39-700-007 ELECTRODE HEATED, UPPER ICS-39-709-002 ELECTRODE LOWER 5" ICS-39-714-006 SHELF WAFER ICS-39-733-003 TEGAL 901E 5" LOWER ELECTRODE, OEM SPEC FINISH ICS-39-733-004 6" LOWER ELECT ICS-39-735-003 LOWER ELECTRODE 5" ICS-39-735-004 TEGAL 903E LOWER ELECTRODE..NON-ANODIZE ICS-39-735-007 LOWER ELECTRODE ICS-39-735-008 ELECTRODES ICS-39-741-001 LOWER ELECTRODE ICS-39-741-004 ELECTRODE LOWER 6" ICS-39-741-009 ELECTRODE LOWER 6" FLAT ICS-39-741-009M LOWER ELECTRODE, MODIFIED, NO FLAT ICS-39-741-010 ELECTRODE LOWER 5" ICS-39-741-011 4" ELECTRODE ICS-39-754-009 LOWER ELECTRODE 5" ICS-39-754-010 ELECTRODE RAD. COMP. 6" ICS-39-832-002 ELECTRODE TEMP. CONT. ANODIZED ICS-39-832-004 ELECTRODE TEMP. CONT. ANODIZED ICS-39-832-005 ELECTRODE, WITHOUT COOLING TUBE ICS-39-927-008 6" LOWER ELECTRODE FOR ..THROUGH THE WALL TEGAL 903E ICS-40-1052-150 END EFFECTOR 150 MM WAFER ICS-40-112-001 RING CERAMIC CHAMBER ICS-40-133-001 WINDOW, SAPPHIRE, ROD ICS-40-140-001 RING INSULATOR, CERAMIC ICS-40-159-001 ROD, SAPPHIRE ICS-40-159-002 ROD, SAPPHIRE ICS-40-244-002 INSULATOR RING ICS-40-249-002 LOWER ELECTRODE DISC 5" ICS-40-249-003 DISC., CERAMIC LOWER ELECTRODE 6" ICS-40-260-001 WINDOW, SAPPHIRE ICS-40-261-002 INSULATOR PAD ICS-40-275-001 UPPER INSULATOR ICS-40-276-001 LOWER INSULATOR ICS-40-279-001 SHIELD DIAPHRAGM ICS-40-284-005 RING, QUARTZ ICS-40-289-002 TOWER ELECTRODE MACOR 5" ICS-40-295-003 RING, ELECTRODE ICS-40-297-001 PIN, QUARTZ ICS-40-297-001C PIN, CERAMIC ICS-40-297-002 QTZ PIN ICS-40-297-002C CERAMIC PIN ICS-40-297-002C-M PIN, CERAMIC, MODIFIED 2.2" LONG ICS-40-297-01C PIN, CERAMIC ICS-40-297-02C PIN, CERAMIC VERSION ICS-40-304-001 INSULATOR LOWER ELECTRODE ICS-40-306-002 CERAMIC RING LOWER ELE ICS-40-395-001 CASTELLATED RING, W/ NO FLAT 6" CERAMIC ICS-40-395-002 RING, PROCESS 5" ICS-40-395-003 RING CERAMIC RAISED ELECTRODE 5" ICS-40-430-003 6" CERAMIC CASTELLATED RING WITH PIN ALIGNMENT HOLE ICS-40-499-005 INSULATOR, UPPER, RETAINED ICS-40-499-010 INSULATOR, UPPER OVERLAP CERAMIC ICS-40-516-005 CERAMIC INSULATOR 4" ICS-40-516-006 RING, RAD CLAMP ICS-40-516-007 RING INSULATOR, MACOR ICS-40-526-003 CLAMP 6" WTC ICS-40-527-003 RETAINER 6" WTC ICS-40-585-003 RING, ELECT, INSULATOR, UPPER, PEEK ICS-40-606-010 QUARTZ LINER 0.2 THK OVERLAP ICS-40-606-013 LINER, CERAMIC 2" THK OVRLP ICS-40-788-615 RING, CENTER, ESC 6" JEIDA CERAMIC ICS-40-789-003 INSULATOR, UPPER FOCUS, QUARTZ, CUSTOMER # 510220 ICS-40-789-004 INSULATOR, UPPER FOCUS CERAMIC ICS-40-790-001 LOWER FOCUS RING, CERAMIC, MUST HAVE SERIAL #, RA INSPECTION & 510588 ADDED TO ENGRAVING
