Categories: All FEATURED PRODUCTS APPLIED MATERIALS GASONICS LAM MATRIX NOVELLUS PLASMA THERM RTA SPTS TEGAL TEL VARIAN VARIAN/NOVELLUS 3180 VARIAN/NOVELLUS 3290 CMP MISC Supported O.E.M.'s All FEATURED PRODUCTS APPLIED MATERIALS GASONICS LAM MATRIX NOVELLUS PLASMA THERM RTA SPTS TEGAL TEL VARIAN VARIAN/NOVELLUS 3180 VARIAN/NOVELLUS 3290 CMP MISC ICS-2805-73778M PAD BACKER MODIFIED WITH 8 ADDITIONAL HOLES ICS-2805-737738 PAD BACKING ASSY, RIVETED ICS-280241 WINDOW QUARTZ HEATER ICS-280095 WINDOW, QUARTZ, 30MM DIA X 3MM THICK, OPTICALLY POLISHED ICS-261259 DISK ICS-26-81142-00 RF STRAP ICS-2470088 SPACER, 200MM CARRIER, 0.010" THK (15PKG) ICS-2470087 SPACER, 200MM CARRIER, 0.007" THK (15PKG) ICS-2470037 SPACER, 200MM CARRIER, 0.001" THK (15PKG) ICS-2469796-B PAD BACKER RIVETED ICS-2461550-102 LOWER ELECTRODE, ANODE 4 PIN HARDCOAT ICS-24604-712209 SHIELD SCREW COVER ICS-2460037 2 PIECE CHAMBER SHIELD ICS-246-6825360 SHIELD 6" TABLE ICS-246-664337 SHIELD, FRONT PLASTE 2/SET ICS-22-00345-00 O-RING, BLACK VITON ICS-22-00344-00 O-RING, BLACK VITON ICS-22-00325-00 LIP SEAL ICS-22-00324-00 LIP SEAL ICS-22-00288-00 T-SEAL, VITON WITH TELFON BACK-UP RING ICS-22-00256-00 O-RING, BLACK VITON ICS-22-00236-00 O-RING, BLACK VITON ICS-22-00234-00 O-RING, BLACK VITON ICS-22-00021-01 O-RING, BUNA/NITRITE ICS-21996-1 SPR, BELLOWS ASSY W/SLEEVE ICS-217724W LIFT PIN, SAPPHIRE, REWORK ICS-216132 NIPPLE, BUTTON, WESTECH CARRIER, OXIDE ICS-215662W CARRIER QTZ, SMSSTP, AKRION, REWORK ICS-215662 CARRIER QTZ, SMSSTP, AKRION, REWORK ICS-215250 SHADOW RING, QUARTZ SUPER E, MXP ROUNDED ICS-2105-420600-31 QUARTZ INJECTOR, SIH4 (L=600) ICS-2105-420423-31 QUARTZ INJECTOR, SIH4 (L=950) ICS-2105-320913-31 QUARTZ INJECTOR, 0.5% BCL3/H2 (L=1296) ICS-2105-320874-31 QUARTZ INJECTOR, 0.5% BCL3/H2 (L=1040) ICS-2105-320828-31 QUARTZ INJECTOR, 0.5% BCL3/H2 (L=682.7) ICS-2101363 WAFER CLAMP ICS-20953 BAFFLE, QUARTZ, UPPER ICS-20952 BAFFLE, QUARTZ, LOWER ICS-2070113W WINDOW, ETCH RESISTANT QUARTZ REWORK ICS-2057788-MOD CLAMP RING 2, MODIFIED VERSION ICS-2057788 CLAMP RING, 2 ICS-2057787 EDGE RING, LOWER CHAMBER ICS-2034289 WAFER SHIELD COVER ICS-203422 SF6 DISC 48-6..2" DIA X 0.700" THICK..DRAWING# R110314 ICS-203124 AF90, DISC, 127-8 DRAWING # R110295, 5003063 REV A ICS-2029442 SHIELD, VIEWPORT, 82MM ICS-2027576 SHIELD, UPPER, SLOT, VAT ICS-2027575 VAT SLOT SHIELD LOWER, W TABS WELDED ICS-2027574 ASSY VIEWPORT SHIELD 82MM ICS-2027573 ASSY, VIEWPORT, SHIELD, 48MM ICS-2023084 CERAMIC CLAMP ICS-20170206 REV 01 SFI ALUMINA END EFFECTOR ICS-20160901 REV 02 SFI PM WINDOW, OUTER TEMPLATE.. ICS-201429-15 TEL UPPER ELECTRODE ICS-201400-1 HIGH VOLTAGE ELECTRODE, GRAPHITE ICS-201380-001W CARRIER QUARTZ, SMSSTP, REWORK ICS-2012070-M COATING Y ALIGNMENT RAIL ICS-2010903A QUARTZ CHUCK PER ICS DRAWING ICS-2005247 RA CERAMIC CENTER STAND, REVISION A ICS-2005246 RA CERAMIC STAND OFF, REVISIONA ICS-2004256 QUART TUBE, 14.75 PLATTER PP9 ICS-20-00222-00 WASHER, ALUM ICS-20-00221-00 WASHER #8 AL ICS-20-00212-02 WASHER, ALUMINUM ICS-20-00212-00 ALUM NUT 8-32 ICS-2-F4-93622 WAFER GUIDE 200MM ICS-2-816481-A BELL JAR ICS-2-3-012-1121 SHIELD SST LEFT SHUTTER ICS-2-3-0112-1122 SHIELD SST RIGHT SHUTTER ICS-2-3-00112W2 SHUTTERS ICS-1D10-330124-12 GAS RING ICS-1D10-315183-15W TEL DEPO SHIELD ICS-1D10-315183-15 DEPO SHIELD, Y203 COATED ICS-1D10-310753-11 CERAMIC RING W/STEP ICS-1D10-309823-11 CERAMIC RING ICS-1D10-309822-12 CERAMIC, WINDOW ICS-1D10-309697-11 TEL WINDOW MODIFIED ICS-1D10-303124W DEPO SHIELD REWORK ICS-1D10-303124-21W TEL DEPO SHIELD, Y2 ICS-1D10-204409-12W BELLOWS COVER, TALL, RECOAT Y203 ICS-1D10-204409-12 Y203 BELLOWS COVER, TALLER ICS-1D10-202292-11 BELLOWS COVER WITH AL2O3 COATING.. ICS-1D10-202204-12 UPPER ELECTRODE, ANOD. ICS-1D10-202203-12 TEL UPPER ELECTRODE W/VESPEL INSERTS.. ICS-1D10-201429-15 TEL ANODIZED ELECTRODE ICS-1D10-102848-13W BAFFLE PLATE, REWORK, T203 ICS-1D10-102848-13 BAFFLE, Y203 COATED ICS-1D10-102809C11W BAFFLE PLATE REWORK ICS-1D10-101475-001W BAFFLE-REWORK ICS-1D10-101398-11:1D10-101398-11-Y203-NEW TEL BAFFLE, Y203 COAT ICS-1D10-101398-11 NEW TEL BAFFLE Y203 COATED ICS-1D10-090060-TMW COVER, BELLOWS, UNITY M ICS-1D05-400022C14W SHIELD REWORK ICS-1D05-400022C14-SRC DEPO SHIELD REWORK ICS-1D05-400022-14 SHIELD WINDOW ICS-1D05-300148-11 ICS-1D05-300052-13 UNITY RING, TEL ICS-1D05-300040-13 RING, INSULATOR, QTZ (DRM2) ICS-19-379884-00 WASHER WITH SLOT ICS-189386B02 ICP CERAMIC CHAMBER ICS-1885-21882-12 QUARTZ SHIELD RING ICS-1875-0440 SHOULDER SCREW ICS-1810-428721-11 SCREW, BELLOWS COVER ICS-1810-428038-12 SCREW SET RING SHIELD ICS-1810-4280371-11 BUSHING, RING SHIELD ICS-1810-428037-11 BUSHING, RING SHIELD ICS-1810-324964-13 BELLOWS COVER ICS-1810-323878-14 INNER, FOCUS RING ICS-1810-323588-1 FOCUS RING, QUARTZ T.E.L. ICS-1810-322881-14 SILICON FOCUS RING ICS-1810-222662-11 FOCUS RING ICS-1810-222443-11 RING, INNER 8K-ESC MODIFICATION, CERAMIC ICS-1810-222433-11 RING, INNER ICS-1810-222191-11 QUARTZ FOCUS RING ICS-1810-221471-24 8" SILICON ELECTRODE ICS-1810-221470-24 ELECTRODE, CRYSTAL ICS-1810-221182-14 QUARTZ FOCUS RING ICS-1810-221018-14 SHIELD RING, T5 MODIFICATION, CERAMIC ICS-1805-220012-14 FOCUS RING ICS-1805-220008-11 QUARTZ WINDOW ICS-18-2004-01 TEFLON BUSHING ICS-17622-01 PLATE, DIFFUSER, QUARTZ ICS-17621-01A QUARTZ PLATE ICS-17621-01 PLATE GAS DISTRIBUTION 6" ICS-17618-01 10" BJNS ICS-17438-3 DOOR SEAL, 270 ICS-17438-1 DOOR SEAL ICS-17438-03 SEAL, DOOR, SEMITOOL ICS-17438-01 DOOR SEAL ICS-17304-01 WELDMENT BTM ASSEMBLY ICS-17303-01 MIDDLE SHOWERHEAD PLATE ICS-17302-01 WELDMENT TOP ASSEMBLY ICS-171180 PROX SENSOR ICS-1708680 INSULATOR WT SOURCE ICS-170090 APERTURE DEFINING PLATE ICS-17-103987-00M RF STRAP 2 HOLE MODIFIED ICS-17-103987-00 RF STRAP, 4 HOLE VERSION ICS-17-101596-00 FORK, RETAINER, SEQUEL ICS-17-00337-00 SPRING ICS-17-00148-00 CLIP SPRING ICS-17-00094-01 RF STRAP, 3 HOLE VERSION ICS-17-00094-00M STRAP RF MODIFIED ICS-17-00094-00 STRAP, HEATER, 6INCH ICS-16784-01 CFQ SPOOLER ICS-16532-01 QUARTZ WINDOW ICS-16337-02 QTZ CHAMBER LINER ICS-16337-01 COLLAR QUARTZ 1.00" HOLE ICS-16218-02W SVG HOT PLATE REWORK ICS-16183-01 ALIGNMENT PIN ICS-16159-02 ANODE COPPER SHIELD ICS-16-331698-C01W SUSCEPTOR SUPPORT REWORK ICS-16-330320 E01 QTZ CHAMBER ICS-16-325876B01 RH TAB, ALIGNMENT TOOL, RIGHT HAND ICS-16-325543B02 LH TAB, ALIGNMENT TOOL, LEFT HD ICS-16-320174-B04 GASKET RESTRICTOR ICS-16-192254D01-RC FILTER, CERAMIC, MULLITE.. ICS-16-107047B01 CERAMIC SPACERS ICS-16-033932-00 GAS HEAD DISTRIBUTION ICS-16-033931-00 8" SHOWERHEAD ICS-16-032079-00 BLANK OFF PLATE ICS-16-00098-00 INSULATED CERAMIC HEATER STRAP, LONG ICS-16-00092-00 INSULATED CERAMIC HEATER STRAP, SHORT ICS-158752 CERAMIC RING ICS-157851 FLOWFILL SHOWERHEAD UNIFORM ICS-156245 INSULATOR RING ICS-155692 SHOWERHEAD FLOWFILL ICS-155682 MK3 PLASMA SHOWERHEAD ICS-155660 SHOWERHEAD ICS-154537 UNIFORMITY RING, PLASMA ICS-15367-01 PIN LIFT QUARTZ ICS-152660 SHOWERHEAD PLASMA ICS-150368 PROX SENSOR ICS-150-00032 REV F CASSETTE TRAY UPPER ICS-150-00030 REV G CASSETTE TRAY LOWER ICS-15-9501 SPREADER ASSY ICS-15-9320 HEATER TABLE SHIELD ICS-15-305097-00 SPINDLE, CERAMIC PLATE, 16 FORK ICS-15-305056-00 CERAMIC FORK, C1 150MM.. ICS-15-290153-00-RA SHIELD, DISK, PEDESTAL, 200MM, CERAMIC REVISION A ICS-15-277464-00-C PLATE, TOP, FORK ASSY..CERAMIC VERSION ICS-15-277464-00 PLATE, TOP, FORK ASSY ICS-15-277463-00 PLATE, BOTTOM, CERAMIC HUB ASSY - C1 & C2 SEQUEL NOVELLUS ICS-15-277460-00 FORK, CERAMIC C1 & C2 SEQUEL NOVELLUS ICS-15-277459-00-C CAP, FORK ASSY..CERAMIC VERSION ICS-15-277459-00 CAP, FORK ASSY ICS-15-170847-00 CERAMIC SHROUD, IRIDIA, 99.5% MATERIAL ICS-15-147608-00 PLATE, E SPACE, 200MM, CERAMIC ICS-15-127072-01 RING, GUARD, PEDESTAL, CERAMIC ICS-15-119059-00 SCREW, SOCKET, HEX 1/4-20 X 0.25" NI ICS-15-11606-00 CERAMIC INSULATOR ICS-15-114331-00 SCREW, 1/4-20 X 0.500L ICS-15-110411-00 VIEWPORT WINDOW, SAPPHIRE COATING, 200 MM ICS-15-108330-00 SPRING, D PEDESTAL, CERAMIC WDEP ICS-15-108307-00 CLAMP, RF STRAP ICS-15-108174-00 CUP, SCREW COVER ICS-15-103913-02 CLAMP STRAP FEEDTHRU ICS-15-103651-01 NOVELLUS C2 ESC RING W POCKET ICS-15-103651-00 RING GUARD, 200MM, COUNTER BORE ICS-15-10324-00M CERAMIC BUTTON ALTUS MODIFIED ICS-15-08209-00 EXCLUSION RING..150MM - 3MM Previous Next